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LU series automatic liquid supply system
LU series automatic liquid supply system
Product details
- As a standard configuration, the steam pressure monitoring function can be used to check the blowing efficiency during the replacement of the main tank
- Optional weighing sensor to monitor the total amount of residual liquid in the mother tank
- The LU-A1000 series features a compact design and an integrated gas system, which significantly reduces size compared to traditional accessories
- Easy replacement of components during daily maintenance
- The deaerator module is a standard configuration that reduces the risk of liquid bubbling and is suitable for various vaporization systems, including injection and baking applications
- Safety standard: SEMI S2/S8/S14, CE mark
- Security improvement: Diversified monitoring devices provide fully automatic control. The LU-A1000 series is equipped with an automatic emergency shutdown function, which will be activated in case of system failure
- Operability improvement: Fully automated operation steps to prevent operational errors. The operation can also be controlled through the touch panel on the front end of the device
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