New high-precision design, space measurement height300mm

Adopting a fully granite structure, fixed bridge structure, mobile worktable structure, precision ball screw, and central linear motor drive effectively reduces Abbe error while improving the equipment's high speed, quietness, smoothness, and achieving high-precision measurement.

HPSeries equipped1:13High resolution automatic coaxial optical system，Integrating non-contact imaging, laser, and contact probe detection functions,It can comprehensively ensure the accuracy of two-dimensional dimensions, height dimensions, and spatial dimensions of precision workpiece processing technology. Different software and hardware can be matched according to the process requirements of different products to meet the different production needs of upstream and downstream processes such as 3C industry, LCD industry, medical industry, semiconductor industry, etc., and improve production efficiency.

Specification parameters: