Dektak XTL probe based profilometer system
Under strict quality assurance and quality control, achieve optimal performance detection of 300mm
Bruker's new Dektak XTL ™ The probe based profilometer system can accommodate samples up to 350mm x 350mm, allowing Dektak to ® Excellent repeatability and reproducibility are applied in the manufacturing of large-sized chips and panels. The Dektak XTL integrated gas isolation device and convenient interactive locking device enable the instrument to operate in a fully enclosed working environment, making it an ideal choice for today's demanding production environments.
Its dual camera setup enhances the sense of space, and its high-level automation maximizes production volume. Vision64 with graphic recognition function unique to Bruker company ® The production interface can meet user needs, making data collection an autonomous and repeatable process, minimizing the impact of operator changes.
Dektak XTL has undergone comprehensive optimization in process development, quality assurance, and quality control applications for continuous production working time and maximum production capacity, and has been designed as the industry's easiest to use probe based profilometer.
Dektak XTL Product Features
Bruker's unique dual camera control system ™
1. Lock in to the focus faster by clicking on real-time videos
2. Quickly locate the sample by selecting two points in the real-time video (automatically rotating to make the line horizontal)
3. Simplify measurement settings by clicking on scan start and end positions in real-time video (tutorial)
Reliable automation settings and operations
1. With the help of a 300mm automated coding XY worktable and 360 degree rotation capability, precise programming controls unlimited measurement positions.
2. Utilize Vision64 bit product software with graphic recognition function to minimize positioning deviation during use
3. Incorporate custom user prompts and other metadata into your plan and store them in the database
Convenient analysis and data collection
1. The rapid analyzer supports most commonly used analysis methods and can easily automate the analysis program
2. Use the step detection function to focus analysis on the features of interest on complex samples
3. Simplify data analysis by assigning unique names to each measurement point and automatically recording them in the database
4. Dektak's legendary performance in the large sample manufacturing industry
The best automatic analysis software in the industry

The addition of software features makes Dektak XTL the most powerful and user-friendly probe based profilometer on the market. The Vision64 software used in the system is fully compatible with Bruker's optical profilometer. Vision64 software enables measurement of samples at any position, 3D drawing, and highly customized characterization methods with the help of hundreds of built-in analysis tools. Vision Microform software can also be used to measure shapes such as curvature radius.

Unparalleled probe based detection technology
The graphic recognition function can minimize operator errors and improve measurement position accuracy as much as possible. Within the same software package, data collection and 2D/3D analysis are carried out using intuitive processes. Each system comes with a Vision software license, which can be installed on a personal computer with the Windows 7 operating system. Users can create data analysis and reports on their computer desktop.

Dektak XTL has over 40 years of professional experience in probe production and software customization, which is in line with the strict industry development blueprint of the present and future.

The 300mm high-precision coding XY worktable provides manufacturers with reliable tools that meet strict repeatability and reproducibility requirements. The Dektak dual camera control system is equipped with overhead cameras and top-notch high magnification side view cameras, enhancing the sense of space; By clicking on the positioning button on the video, the operator can quickly adjust the sample to the correct position for quick and simple measurement setup and automated programming. The convenient chain door of the system makes sample loading and unloading safer and faster. Other hardware features include:

1. Single arch structure and integrated isolation structure used to achieve extremely low noise levels
2. Probes that can be quickly replaced and automatically calibrated
3. High precision coding XY workbench used to accelerate automatic data acquisition

4. The N-Lite uses Soft Touch technology and a 1mm measurement range when applied with low force, allowing for precise and high vertical range sample measurements

Key achievements in large-scale applications
With its unique combination of superior performance and ease of use, Dektak XTL has become a new research standard for quality assurance/quality control, applied in industrial thin film deposition monitoring for touch panels, solar panels, flat panel displays, and semiconductor industries.
Chip application:
Step height of deposited thin films (metal, organic)
Step height of resist (soft film material)
Etching rate measurement
Chemical mechanical polishing (corrosion, indentation, bending)
Large scale substrate applications:
Printed circuit board (protrusion, step height)
Window coating
Chip mask
Chip chuck coating
polishing plate
Glass substrate and display applications:
AMOLED
Step height measurement for LCD screen development
Thickness measurement of touch panel film
Measurement of Solar Coating Thin Films
Flexible electronic device thin film:
Organic photodetector
Organic thin films printed on films and glass
Touch screen copper traces
Probe based profilometer system Dektak XTLTechnical Parameter
Software options: Automatic graphic recognition; Advanced software interface
Isolation: High performance isolation, passive pneumatic air isolator
Scanning length range: 300mm
Number of data points covered by each scan: 120000, maximum
Maximum sample thickness: 50mm
Maximum chip size: 300mm
Maximum sample volume: 350mm
Step level height reproducibility:<5 angstroms @ 0.1 micron height standard sample, 1 standard deviation
Vertical range: 1mm
Vertical resolution: maximum 1 angstrom (@ 6.55 μ m range)
Input power: 100 to 240VAC, 50 to 60Hz
Temperature range: 20 ° to 25 ° C (68 ° to 77 ° F) Operating range
Humidity range: ≤ 80%, no condensation
System size and weight: 978 millimeters (38.5 inches) wide x 954 millimeters (37.6 inches) deep x 1714 millimeters (67.5 inches) high; 272kg (600lbs)