New benchmark for probe based profilometer - upgraded to optimal performance

The German Bruker DektakXT step profiler (probe based surface profilometer) is an innovative design that provides higher repeatability and resolution. The improvement in the performance of the stair step gauge has reached the peak of Dektak's technological innovation in the past forty years, further consolidating its industry-leading position. Whether applied in research and development or product measurement, DektakXT will definitely be able to achieve more powerful functions, easier operation, more complete detection process and data collection through extensive use in research work. The technological breakthrough of the tenth generation DektakXT step meter (probe based surface profilometer) has made it possible to measure surface contours at the nanoscale, which can be widely applied in the research and development of microelectronic devices, semiconductors, batteries, high brightness light-emitting diodes, and materials science fields.

Thin film testing - ensuring high yield
Closely monitoring the uniformity of deposition and etching ratios, film stress in semiconductor manufacturing can save a lot of time and money. Uneven or excessive stress in thin films can lead to poor performance of real estate and finished products. DektakXT can conveniently and quickly set up and run automatic multi-point testing programs to verify the precise thickness of chip films, reaching the nanometer level. DektakXT's unparalleled reproducibility provides engineers with precise film thickness and stress testing to precisely adjust etching and deposition for profit
Surface roughness testing - ensuring performance
DektakXT is suitable for routine surface roughness assessment of precision machine components in many industries, including automotive, aviation, and medical equipment. For example, the roughness of hydroxyapatite coating on the back of orthopedic implants can affect the adhesion and efficacy after implantation. Utilizing DektakXT's ability to quickly analyze surface roughness to determine whether crystal production meets expectations and whether implants can meet product requirements. By using the pass/fail standard of Vision64 database, the quality management department can easily determine whether the implant has been remade or ensure its quality
Analysis of Solar Grating Lines - Reducing Manufacturing Costs
In the solar energy market, Dektak is the preferred choice for measuring the critical size of conductive silver grid lines on monocrystalline silicon and polycrystalline silicon solar panels. The height, width, and continuity of silver wires are closely related to the energy guidance of solar cells. The ideal state of production is to use silver appropriately to have the best conductivity without wasting expensive silver. Dektak XT achieves this through software analysis, reporting the critical dimensions of silver gate lines to determine the precise components required for conductivity to occur. Vision64's data analysis methods and automated features contribute to the automation of the verification process.
Microfluidic Technology - Detection Design and Performance
Dektak XT is the only probe profiler capable of measuring photosensitive materials with angstrom level reproducibility over a large vertical range (up to 1mm). Researchers in the MEMS and microfluidic technology industries can use Dektak XT for qualification testing to ensure that parts meet specifications. Low effectMeasurement function NLite+touch sensitive material to measure vertical steps and roughness
Over 40 years of continuous innovation
Built on over 40 years of knowledge and experience in innovative probe profiling technology - the first thin film tester, the first microprocessor-based profiler, and the first 300mm automatic profiler DektakXT inherited the previous "firsts". The new DektakXT is the first probe profiler designed as a single arch, featuring a built-in true color high-definition optical camera and a 64 bit parallel processing architecture for optimal measurement and operational efficiency
There are over 10000 devices worldwide, and the Dektak brand is renowned for its quality, reliability, and high cost-effectiveness. When precise and reliable measurements of step height and surface roughness are needed, people turn to Dektak. Introducing DektakXT and Bruker allows you to further obtain reliable and efficient surface measurements
Improve data collection and analysis speed
By utilizing a unique direct drive scanning platform, Dektak XT reduces the time between scans without affecting resolution and Beijing noise. This improvement greatly improves the scanning speed for large-scale scanning of 3D morphology or long-range scanning of surface stress (which is usually time-consuming for probe profilometers). DektakXT can increase data collection and processing speed by 40% while ensuring industry-leading quality and reproducibility. In addition, DektakXT uses the Bruker64 bit data acquisition and analysis synchronous operation software Vision64, which can improve the processing speed of large-scale 3D morphology images with high data volume, and can accelerate the working speed of filters and multi-mode scanning for data analysis. Vision64 also features the most efficient and intuitive user interface in the industry, simplifying experimental operation settings and automatically completing multiple scanning modes, making repetitive and routine experimental operations faster and simpler.
Realize reproducibility of measurements
The leading design of DektakXT gives it excellent performance in measuring step height reproducibility, which can be better than 4 angstroms. The use of a single arch structure is more stable than the original cantilever beam design, reducing sensitivity to adverse environmental conditions such as sound and vibration noise
Application industries: touch screen, semiconductor, solar energy, ultra-high brightness light emitting diode (LED), medicine, materials science, universities, research institutes, microelectronics, metals and other industries to achieve nanoscale surface morphology measurement
The Dektak XT stair step meter can achieve:
Unparalleled performance, with a step height reproducibility of less than 4 angstroms
Single arch design provides breakthrough scanning stability
Advanced 'smart electronic devices' set a new low noise benchmark
New hardware configuration reduces data collection time by 40%
64 bit, Vision64 synchronous data processing software, which increases data analysis speed by 10 times
Unprecedented frequency and easy operation
Intuitive Vision64 user interface, easy to operate
Needle tip automatic calibration system, unparalleled value
Bruker achieves the highest performance with affordable configuration
Single sensor design, providing low impact and wide scanning range on a single plane
Specifications:
Measurement technology: Probe profilometer DEKTAK XT
Measurement function: 2D surface contour measurement/optional 3D measurement
Sample scene: optional magnification, 1 to 4mm FOV
Probe sensor: Low inertia sensor (LIS3)
Probe pressure: using LIS3 sensor: 1 to 15mg
Probe options: Probe curvature radius optional range: 50nm to 25 μ m; High aspect ratio (HAR) needle tips: 10 μ m × 2 μ m and 200 μ m × 20 μ m; Customized needle tips according to customer requirements
Sample X/Y stage: manual X-Y translation: 100mm (4 inches); Mobile X-Y translation: 150mm (6 inches)
Sample rotating table: manual, 360 ° rotation; Mobile, 360 ° rotation
Computer system: 64 bit multi-core parallel processor, Windows7； Optional 23 inch flat panel display
Software: Vision64 operation and analysis software; Stress measurement software; Stitching software; 3D scanning imaging software
Shock absorption device: Shock absorption device is available
Scanning length range: 55mm (2 inches)
Scan data points each time: up to 120000 data points
Maximum sample thickness: 50mm (2 inches)
Maximum wafer size: 200mm (8 inches)
Step height reproducibility:<4 angstroms, 1 sigma in a vertical range of 1 μ m)
Input voltage: 100-240VAC, 50-60Hz
Temperature range, operating range: 20 to 25 ℃
Humidity range: ≤ 80%, no condensation
System size and weight: 455mmW × 550mmD × 370mmH (17.9in. W × 22.6in.) D×14.5in. H) 34 kilograms (75 pounds); Attachment: 550mmL × 585mmW × 445mmH (21.6in. L × 23in.) E×17.5in. H) 21.7 kilograms (48 pounds)