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Double furnace sliding PECVD system&circulating glove box OTF-1200X-PESDFG-50
Double furnace sliding PECVD system&circulating glove box OTF-1200X-PESDFG-50
Product details
OTF-1200X-PESDFG-50 is a dual furnace sliding PECVD system connected to a circulating glove box. In this device, the quartz furnace tube is connected to a circulating glove box, allowing customers to directly transfer the sample into the glove box under atmospheric protection after the sample is made by CVD method. The furnace body adopts a sliding type, which can quickly heat and cool the sample during laboratory testing. This instrument is particularly suitable for the exploration and research of new generation nanomaterials and two-dimensional crystal materials.
| Technical Parameter | ||
|---|---|---|
| Furnace structure(Click on the image to view detailed information) |
Two furnace bodies are placed on a sliding rail, and the effect of rapid heating and cooling of the sample is achieved by sliding the furnace bodies Continuous operating temperature: 1100 ℃ Both furnaces can be equipped with 30 temperature rise and fall programs |
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| Plasma RF power supply |
● Output frequency: 13.56 MHz ±0.005% Maximum RF power: 500W ● Matching: Automatic matching ● Noise:< 50 dB. ● Cooling: Air cooling ● Input power supply: 208-240VAC, single-phase, 50/60Hz |
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| vacuum system |
● Adopting VRD-16 dual rotary vacuum pump, with a maximum vacuum of 10E-3 Torr KFD25 quick connect, stainless steel corrugated pipe, manual baffle valve and flange, connected to vacuum pump The vacuum inside the tube can reach 10E-2 Torr |
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| Mass flow meter mixing system |
Four precision mass flow meters (accuracy 1.5%): digital display, automatic control ● MFC1 range: 0~100 sccm MFC2 and 3: 0~200 sccm MFC4 range: 0~500 sccm A gas mixing tank with a waste liquid outlet at the bottom Four stainless steel needle valves are installed on the left side of the gas supply system, which can manually control four types of gases ● Air intake: 4 1/4NPS ● Air outlet: 4 1/4NPS ● Using PLC to control the flow meter, controlled through a touch screen Optional purchase of gas-liquid mixing device for CVD system |
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| Furnace tube&sealing flange |
High purity quartz tube, size 50mm O.D x 44mm I.D x 1800 mm L Equipped with a set of stainless steel sealing flanges and vacuum gauges installed on them |
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| Anti corrosion vacuum gauge |
Input power supply 24V, 1A DC (equipped with a voltage converter) Measurement range: 3.8x10-5-1125 Torr ● Data display digital display (screen size is 20x14mm), with data display unit in torr ● KF16 connector Product size 46mm × 28mm × 126mm (L x W x H) |
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| Circular glove box |
Glove box size: 780mm (L) x 700mm (W) x 650mm (H) Equipped with a water removal system: maintaining a water content of<2 ppm A vacuum flange is located on the left side of the glove box and connected to the quartz tube of the PECVD system |
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| Warranty period | One year warranty period, lifetime maintenance (excluding furnace tubes, heating elements, and sealing rings) | |
| Certificate | ● CE certification ●All electrical components (>24V) are certified by UL/MET/CSA |
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